D26MR00

D26MR00

D26MR00

D26MR00

D26MR00

由式（5）不难算出，当负载获得 大加速度时，折算到电机轴的负载惯量JLM与电机转矩JM之比为1:1。从以上分析可知，在理想状态下，调整负载电机惯量比为1:1有助于系统的加速性能。但在实际应用过程中，

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由于传动装置的效率，空程间隙等机械特性，传动装置自身的惯性，负载的反冲作用，系统的传动刚性等诸多因素的影响，设置负载惯量比为1:1并不具有很高的效率，而且增加减速比的方式也会提高整个系统所需要的加速转矩。在如上诸多因素中，系统的传动刚性是 需要考虑的问题，因为在系统传动刚性较差的前提下，如果负载电机的惯量比过大将会导致系统振荡，出于系统稳定性的考虑，需要修改电机到负载的传动模型。

1.2改进模型

使用一根弹性轴作为连接负载和电机的传动装置，忽略传动装置的内部细节，忽略弹性轴直径等次要因素，仅仅将注意力放在传动刚性上，基于以上假设建立负载和电机之间的传动模型，其示意图如图2：

图2  电机——负载弹性传动模型

图中：TM为电机的输出转矩；TL为负载转矩；BM和BL分别为电机和负载的粘性摩擦系数；KS为弹性轴的抗扭刚度；ωM和ωL分别是电机和负载的转速，θM和θL分别表示电机和负载角位移，θS为弹性轴的扭转度。

YASKAWA AC BHLESS MOTOR SERVO, SGMP-01U314CM

EMOTEQ BHLESS DC SERVO MOTOR HS01001-A02-HGE

YASKAWA BHLESS AC SERVO MOTOR, SGMP-01U314CM

FLUOROWARE PNEUMATIC MANIFOLD VALVE, 1/2", 710-416X2

ION SYSTEMS FLOW BAR CONTROLLER, 100VAC, 1/4 A

LAM PC Assembly 28-8875-037

LAM/ONTRAK Power Supply 40-0075-007

KOBOLD INSTRUMENTS FLOWMETER, SV-10

CTE CHEM TEC / SEMITOOL ANALOG FLOWMETER, 

Flowline Level Transmitter KC-LA15-5001

Semittol Optical Motor Encoder W/Brake

Semitool / Hathaway Motor Encoder W/Brake

APPLIED MATERIALS INC. LINER, SIDE, P19500 AMI

LAM ASSEMBLY GAP HEATING

RTS SPARES LLC ASSEMBLY. SHUTTER, A65

LAM PLATE, BAFFLE, LOWER, 8.3 (4428)

APPLIED MATERIALS COVER, QUARTZ 6" POLY, 0200-00043

DAIFUKU CO., LTD UNIT (S/R) YAGI OPTI, TRANSMIT

Entegris 2 WAY VALVE 3/8 X 1/4 ORIFICE 201-87-01

APPLIED MATERIALSAPERTU?RE, SILICON CARBIDE, EHO AMI 

POLY FLOW ENGINEERING MOTOR, GEAR, 3RPM, 1/50TH HP

AMETEK GAS INDICATING PRESSURE SWITCH IPS-200-LA

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Applied Materials 0010-99166 MOVING CLIP ASSEMBLY

SCANDIALOGIC CONTROLLER, SCM750-1

SEMITOOL DIGITAL FLOWMETER FT0-4A1YS-LHA-1

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Hayward Actuator for drain Valves KC-PHS15

Applied Ceramics RING XL CLAMP SILICON, 91-01394A

Applied Ceramics VALVE SLIT INSERT QUARTZ 91-01680A500

FLOWMETER 5-20 GPM 3/4 FLR ENDS 72056-85 

MILLIPORE .05 MICRON QUICK CHANGE FILTER, QCDZATXTH

Applied Materials 0020-82813 ELECTRODE, APERTURE, EHO- 

Ultrasonic Ranging Proximity Sensor RPS 300

MILLIPORE WAFERGARD T-LINE GAS FILTER WGGB 12S02

PARKER REGULATOR BACK PRESSURE, BR-3-1168-2

AUTOMOTION MOTOR CONTROLLER ALC1500 MAGNUM

CUTLER-HAMMER INTRIAL CIRCUIT BREAKER, EHD3020L

PARKER REGULATOR DI 0-60PSI 1/2 FNTP PTFE, PR-3-1118-2 

Integrated Power Designs Power Supply SRW-115 4005

DATA INSTRUMENTS DIGITAL FLOWMETER, 410500-9022/AFL?AS


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Sensor Technics Pressure Transducer 839-607828/SQ00?503

AP Tech Regulator AP1910SM/889-60?6950

MKS Manometer ABS 124AA-00100BB

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Applied Materials 0020-82821

Applied Materials 0020-83583 SHIELD GUIDE TUBE 9500XR 

SENSARRAY 6" TEST WAFER PART 1501B-6-0001 

MAEK LOADER, 10-349222-01

Futurestar Rotameter-Flowm?eter

Air Products N2 Trickle Purge Plumbing 216730

Control Concepts AC Noise Filter KC-IE-110

Applied Materials, ESC ASSEMBLY 125 MM, 0090-00091

Setra Pressure Transducer 2251100PGD41106

APPLIED MATERIALS SHADOW RING 0200-00156

NT INTERNATIONAL FLOW THRU PRESSURE TRANSDUCER

ASTI Flow Sensor 20 L/min, 3/4 FLR

Entegris 4/2" PFA Hand Valve 201-42-01

APPLIED MATERIALS SCREEN SLIDE ENTRY 9500XR - AMI

DNS ELECTRONICS ARM, 1H (2) - 80A- SCRUBBER

Intelligent Motion Systems (IMS) Microstepper and Index

Pentagon Tech Pedestal, Quartz, Pinless, Q15-0217

BIMBA MOTOR ASSEMBLY WITH HIGH TORQUE PLATING 0G70-S YG

A, I/O Board, w/ standoffs AIM104-RELAY8/I?N8

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LFE INSTRUMENTS TEMPERATURE CONTROLLER 955241C-1190

Flextech, Cab Controller, 2103-0391

EUROTHERM DRIVE, B5261101BZ

Entegris 1/4" Auto valve w/check valve KC-202-69-01

APPLIED MATERIALS DC POWER SUPPLY, 01-81913-00

Saint Gobain Door Seal 480150091

AP2 Solenoid Bank 16V VV3Q11-ULB97019?3-16

Air Products Solenoid Digi. output board 809-607699

NT INTERNATIONAL ACID TRANSDUCER 1/2 FLR 0-60PSI

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SMC APX16-Point Solenoid Bank 13V VV3Q11-ULB97019?4-13

SMC APX16-Point Solenoid Bank 10V VV3Q11-ULB97019?4-10

Granville-Phill?ips 275 Convectron Gauge For N2

MRC PCB, STEPCONTI/F, 884-55-000

Cable, Sensor, PT-100 85939

Saint Gobain Door Seal 480150089

Nikon PCB 4S018-210A

APPLIED MATERIALS PEDESTAL ASSEMBLY, 0010-09574

Cutler Hammer Intrial Circuit Breaker

Yaskawa Servo Motor, SG25TA-PE01A1

ASTI Flow Sensor 10 L/min, 1/2 FLR

Blue White Flowmeter, 0.2-2.0 gpm, Model F-500

Futurestar Odyssey Flowmeter 1 pm, 1/4 FLR

Futurestar Odyssey Flowmeter 1.75-5 lpm, 3/8 FLR

Futurestar Odyssey Flowmeter 5-25, 1/4 FLR

Yaskawa AC Servo Motor, Bhless with Brake

MKS INSTRUMENTS BARATRON, 1 TORR, 370HA

EMOTEQ CORP MOTOR ASSY PADDLE ACTUATING HS01001-A02-HGE

PATLITE SIGNAL TOWER, SL-402V

APPLIED CERAMICS, CERAMIC PLATE, 200MM, 716-028721-281

Cherry Electric exht vane switch 1491-3144

ASYS CONTROLLER, 10052885

FURON 1/2", 2 way Valve, DIBPOL8PC

FURON OMNISEAL 3/16" X 12.375" 70887-23

INSERT, INNER, MULTI-CHARGER/B?EAM TRAP MULTI-CHARGED 

HATHAWAY/EMOTEQ MOTOR LIFT/TILT, BH02301A F04HBE 

Micronix, I/0 board, PV-1648 Rev.3

A, I/0 board, AIM104-ANALOG-I?/O

Air Productsm. Controller board 287-607240

WESCO DISCONNECT SWITCH, NZM7-200-NA

Yaskawa AC Servo Motor, SGMP-01U314M

BIORAD 5" Cassette, QS600, 013-5363-1

APPLIED MATERIALS FINGER LONG HOLLOW GRIPPER -AMI (SLO

FURON 1/2", 2 way Valve, WB-2W8P-C

LEYBOLD STRAIGHT THRU VALVE, 428902

Air Products LCD Display 1730-7203

AP200 Shuttle adaptor kit, AP20-K-250

APPLIED MATERIALS PCB, SIGNAL CONDITION, ASSEMBLY

APPLIED MATERIALS ARC CHAMBER P19500

LAM RING, CLAMP-UPPER ELECTRODE

Trebor Model 85 Surge Suppressor

Finish Thompson / FTI Vertical Mag Drive VKC80VST336

Finish Thompson / FTI Vertical Mag Drive VKC80VST348

APPLIED MATERIALS INC. VANE, (MRS)P19500 AMI

Speedfam Load Cup

Lambda Power Supply, 500W, 24 VDC, FE050024RA

Applied Materials Gas Distribution Plate

DNS ELECTRONICS ARM, IH (2)- 80A SCRUBBER

OMRON CAPACITIVE PROXIMITY SWITCH, E2K-C25MF1

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SMC VALVE SHUTTLE CAM PUMP F25 KT-PA2-38

Semitool OPTICAL BOARD ASSEMBLY 16730-01

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Akrion Steag Valve PVDF610/15/D 720 1 410200

APPLIED MATERIALS COVERING PIPE, 0020-0930

DNA CERAMIC IH ARM L=110MM 2-F3-31399

DAIFUKU MOTOR, CONV. ORIEN. TRAVEL BODY

Watlow Din-A-Mite DB2C-2060-C050

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Lambda Power Supply SC150U03

Lee ATMI Micropump LPVX0505600CA

Applied Materials 0020-81482

Applied Materials 0020-82822

TRIPP LITE UPS System SMARTINT700

ATMOS Air Handling Filter 2FM-22

Clean Room Products Air Handling Filter U3030A00ADACACA

Parker Motor MPC 1140X

Harowe Resolver 31BRCX-500-B1

Pacific Scientific Motor R63FSSA-HS-SS-N?V-04

POLYPURE BATH

SENSOR, SOG FLOW 3x2 N.C. ST21

DYTEC VALVE, DUMP RINSER, QDV-400-PVDF-V

SMART UPS 1000VA BATTERY BACKUP

APPLIED MATERIALS HEATER BAND FOR TMS KIT, 1410-01124

DWYER PHOTOHELIC GUAGE, KC-3003MR

APPLIED MATERIALS SHOWER HEAD,5B PUTTER ETCH 0020-09933

MIKRO ELEKTRONIK M34, M-Module, 04M034-00

BALZERS ROLLE COUPLING, BB180942-T

EIT SENSOR STIK, 0-25 PPM, SERIES 4500

DELCO BATTERY BACK-UP, RST31

Circuit Board DAMPER CD BG4-8615

Circuit Board M-POS (CONVERTER) BG8-3326 BH8-1970-01

Circuit Board CDIF BG4-6631 BH8-1823 BG8-2676

DAIFUKU CO. LTD. BOARD (TFE) DAIFUKU P.C.-3419B

EARTH LEAKAGE BREAKER ASSEMBLY #5, 

Circuit Board LIBRARY CONTROL PCB BG4-8193

HRD SENSOR PCB BG4-6583

CIRCUIT BOARD VEDZ-177BX

JENCONS VAC SEAL

VARIAN TYPE 572 IONIZATION GAUGE, K7360301

Applied Materials 0020-04076 

LAM ENCODER ASSEMBLY, MOTOR STEPPER ARM DRIVE

EDWARDS SERIES 1 EXHT MODULE

VARIAN ANGLE VALVE, L6281-301

VARIAN ANGLE VALVE, L6281303

Tripp-Lite Power Supply System OMINSMART 700

Applied Materials 0020-25662 SHIELD, CLAMP, SCRWLES- CO

Humphrey Solenoid Bank ST022601CJ-01
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LAM PC Assembly 28-8875-012

APPLIED MATERIALS INSERT PINS, SILICON,125 MM,0200-3671

Pepperl+Fuchs Dual Discrete Signal Isolator Switch EX2

LEYBOLD POWER SUPPLY, 100/250

Ontrak Extender Arm Bracket 13-8800-047-02

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Futurestar Fiberoptic Sensor Flowmeter 400-003-80

CONTEMPORARY CONTROLS STANDARDWORK CARD SB871660-10

VALVE, AIR OPERATED RK-AOV

MRC Eclipse Receiver Remote Control Board, 883-87-000

METRON TECHNOLOGY, THERM-X RODS 0641-0767-02 TYPE R


ZIEHL-ABEGG ELECTRONIC SPEED CONTROLLER, PAE10E-M

GasFlo Products, Inc. PT SERIES CGA PT-AP-724SS-4TS

GasFlo Products, Inc. PT SERIES CGA PT-AP-638SS-4TS

Idec 24 VDC Power Supply (C) PS5R-D24

MICRORAM 48V MOTOR AMPLIFIER, 208718-1

DAIFUKU BOARD (MCP) DAIFUKU P.C.

Malema Flow Switch M60-6T-SS-SP

Patlite Light Tower WM-302T

SUNX Wafer Sensor M-826

LAM SERVO MOTOR, 853-013720-608

Baldor 2 HP Motor VM555

Flanders Air Handling Filter

Flanders Air Handling Filter

LAM ASSY, VACUUM SWITCH, 100 TORR 853-017480-002