1761-L20BWA-

1761-L20BWA-

1761-L20BWA-

1761-L20BWA-

1761-L20BWA-

OvationDCS采用FDDI通讯网络, 通讯速率为每秒100 MB，处理容量为每秒200 000 点实时信息, 联网长度达200 km , 节点《联系人；欧先生》
《座机：0592-5709825》
《传真：0592-5917519》
《24小时热线：18030229053微信同步》
《QQ  ：2479261344》
《QQ邮箱：2479261344@qq》
数 多1 000 个。I/ O 的精度提高到13 位, 分辨率优于0.11 % , 扫描效率每秒为10 次。计时采用令牌存取方式, 确保每秒实时传送200000 个过程点数据。工程师站和操作员站均采用DELL 商用机 , 交换机采用CISCO 产品。 

二. 工艺流程

1.齿轮箱水冷：本系统设两台水泵，一台投入工作，另一台备用。水泵的进水管与接受罐相通。水泵出水经过自清洗过滤器的过滤后，进入换热器，再经电磁流量计、电子除垢器和有关手动阀门后进入齿轮箱。齿轮箱的回水靠本身重力流回到接受罐。罐内有一块隔板（接受罐内的上部是相同的），齿轮箱回水在隔板的一侧，补水管和泵吸水管在隔板的另一侧。自清洗过滤器是机电一体化设备，滤网污染后压差增大，当上升到一定的预置压差时，差压控制器控制自动反洗。

2.气密箱氮封冷却：齿轮箱温度≥70℃时，通往水冷齿轮箱的氮气管路调节阀A1开大，通往阀箱的氮气管路调节阀A2打开应急冷却，齿轮箱温度≤55℃时，A1阀关小，恢复正常供氮，同时关闭A2。阀箱温度≥120℃时，A2开大，打开阀A1，阀箱温度≤70℃时，A2关小，恢复正常供氮。

3.接受罐平衡水位：它的主要作用是向水泵供水，接受齿轮箱的回水。为了平衡压力，有一个气管与齿轮箱连通。齿轮箱回水带进的杂质沉淀后，通过接受罐底部排污管上的电动球阀排出罐外。一根通往罐内的补水管用作补水，补水管路上装有电动球阀。

Horiba CS-151 Conc. Mon., Fiber Optic CS-151F1-0510-QU

5" GSD DISK, 125mm Wafer Process, 1183060C

PLASMOS ELLIPSOMETER, SD2000

BLUE POWER TRANSFORMER, TE3B-150K-GN-NF

Air Products Manifold, Main SG 100 1491-3113-1A

Kensington, Robot WFH4C-TT/SR/HS

White Knight Pump AP300

5" GSD DISK, 125mm Wafer Process, 1183060

Allen-Bradley 10" Panel Color Touchscreen 2711-T10C16

Air Products Chemguard Controller 839-607436

White Knight Pump AP200

Kensington, Robot WFH3C-TT/SR/HS

Air Products 2Cyl AXO-AP1510SM-NH?3 807-470626502A

Edwards QDP80 Dry Pump

Air Products 2Cyl AXO-AP1402TSMA-?WF6 214463

TEL Liner, SIC Low Temp,Pyro, Gate Ox, DS1105

TEL Liner, SIC Low Temp, Pyro Gate Ox, DS1105-200493-1?3

Air Products 2Cyl AXO-AP1510SHM-H?Br,HCl 46635

Kensington, Pre-aligner and Controller

LAM Variable Gap Drive

SEIKO-SEIKI SCU-300H TURBO MOLECULAR PUMP CONTROLLER

Thermo Polysonics Ultrasonic Flowmeter KC-DCT1088

LAM Inner Gate Assembly (Fully refurbished with order)


DATA INSTRUMENTS DATA ACQUISITION SYSTEM, DI-500-16-P

One (1) As-Is Variable Gap Drive for a LAM9600

White Knight AP200 Rebuild Kit RBAP200-1

SEIKO-SEIKI TURBO MOLECULAR PUMP STP-300H

Det-Tronics Dual Spectrum IR flame detector PM-5MPX


Allen-Bradley SLC 5/05 16Ker memory KC-1747-L551

FALA Intries Centura HP Robot PM Kit H22589

AMAT CTI Cryogenics Cryopump w/ACM, 8116081G006 

SMC Solenoid Pneumatic Harness, Right, CG400 122972

SMC Solenoid Pneumatic Harness, Left, CG400 122935

HUBER UNIPUMP II, NEW IN BOX

Infineion Technologies Valve Control Box KC-VCB

K-PATENTS SENSOR W/10-32 PORT FOR N2 PURGE

Air Products Pigtail for B2H6/N2 cab 809-470790604A

K-PATENTS INDICATING TRANSMITTER, IT-RU-GP

KLA Instruments Mass Memory PCB 710-658051-20 REV F0

KLA Instruments Corner Turn PCB 710-655651-20

ESI 100uL Nebulizer ES-2002

GREENEED O-RING, ALD CHEMRAZ, 18.955 ID X 0.275 W

Applied Materials ASSEMBLY, ESC POWER SUPPLY 0010-40239

DNS Robot Assembly For Model 60A, 150mm

HP Semiconductor Parametric Analyzer 414

MKS THROTTLING VALVE, 656A-15267

LEYBOLD, CHEMICAL FILTER, NEW, CFS40-65

CERADYNE HEATER ASSEMBLY 200MM TF-101-9-1

Swagelok Process out stick- 809-47031391

TEL Baffle, Quartz, 1B05-200052-13

INOVA STAGE SHIELD, CLAMPLESS, CLEANED 17-112194-00

Olym Microscope

CTI Cryogenic Cryo-Torr High Vacuum Pump

SEMITOOL/ FILTER PUMP INTRIES FILTER CHAMBER

MKS Baratron Capacitance Manometer 626A-12319

Air Products Monochrome Display Kit 287-607997

LEICA STEREOZOOM 4

Pentagon Tech Quartz, Bell Jar, Q15-0130

TEL T-CDFVN VOS-40-014 0 IS DIF DS 1187-072378-14

SIEMENS 6ES5242-1AA32 SIMATIC S5


ASYST INDEXER MASTER CONTROLLER 

LAM Kit, crtsy, cal, te 843-022046-001

LAM KIT, CRTSY, REMOVAL, TUN ESC 843-02246-002

LAM Kit, crtsy, cal, te 843-022046-001 REV B

CPU, PROG. EPROM DC:5/99855-0104?09-007

DYNATRONIX PROGRAMABLE PULSE POWER SUPPLY, 104/1-1-3

LAM RING FO, THIN EDGE, 8' 4428 716-011638-008

Burks Close Coupled Centrifugal Pump

Semitool 50 Wafer Carrierless Rotor

SIMCO Pulse Flow Controller Ionization Kit, 10 Chamber

LEYBOLD ARW6000 ABSORBER

Semitool 50 Wafer Carrierless Rotor

ESI PFA Pure Chamber & PFA cap ES-2100-5472

Air Products Plis Interface Box 0010-30002

Cyonics, LASER POWER SUPPLY 120VAC 2.4AMPS, 2114-20SLK

Olym BH Microscope

PALL Megaplast G2 w/Chemraz O-Rings PFGF1P12H12

Greeneed HDP, L-Motion, Bonded SV, 5641A-1282-SC63?9

ENVIRCO PERFORMANCE MACH 10 HEPA FILTER, 69506-018

MRC Eclipse Control Board PCB 884-13-000

PALL TRINITY FILTER HING 25UPS1G, 4HD4886-2316

BHLESS DC MOTOR SERVO, RATIO 1/80 T61105-59

NT INTERNATIONAL TRANSDUCER ACID 1/2 FLR 0-60 PSI 4210-

EUROTHERM POWER SUPPLY, 661/01/00